Direct and quantitative broadband absorptance spectroscopy on small objects using Fourier transform infrared spectrometer and bilayer cantilever probes
A measurement platform is introduced that combines a bilayer cantilever probe with a
Fourier transform infrared spectrometer to measure absolute spectral absorptance between
wavelengths of 3 μ m and 18 μ m directly and quantitatively. The enhanced sensitivity
provided by the cantilever probe enables the quantitative characterization of micro-and
nanometer-sized samples. Validation of the technique is carried out by measuring the
absorptance spectrum of a doped silicon thin film with a backside aluminum layer and found …
Fourier transform infrared spectrometer to measure absolute spectral absorptance between
wavelengths of 3 μ m and 18 μ m directly and quantitatively. The enhanced sensitivity
provided by the cantilever probe enables the quantitative characterization of micro-and
nanometer-sized samples. Validation of the technique is carried out by measuring the
absorptance spectrum of a doped silicon thin film with a backside aluminum layer and found …
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