Effects of strain on the dielectric properties of tunable dielectric thin films
S Hyun, K Char - Applied Physics Letters, 2001 - pubs.aip.org
We fabricated an epitaxial Au/SrTiO 3 (001)/SrRuO 3 (or CaRuO 3)(001)/SrTiO 3 (or LaAlO
3)(001) heterostructure to investigate the effect of the strain on the epitaxial tunable dielectric
thin films. SrTiO 3 thin films showed very different dielectric properties depending on the
bottom electrode with an opposite lattice mismatch. The SrTiO 3 thin films grown on the
CaRuO 3 bottom electrodes showed nearly a two times larger tunability than that on SrRuO
3. We think this is due to the different strain on the SrTiO 3 thin films. The tensile strain along …
3)(001) heterostructure to investigate the effect of the strain on the epitaxial tunable dielectric
thin films. SrTiO 3 thin films showed very different dielectric properties depending on the
bottom electrode with an opposite lattice mismatch. The SrTiO 3 thin films grown on the
CaRuO 3 bottom electrodes showed nearly a two times larger tunability than that on SrRuO
3. We think this is due to the different strain on the SrTiO 3 thin films. The tensile strain along …
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