The objective of this study is to exhibit the capability of Monte-Carlo simulation in the frame
of surface spectroscopy using elastically reflected electrons. Our computer programme is
based on sample descriptions as stackings of atomic layers. Results allow us information on
important parameters as the penetration depth of the electron beam or angular reflections.
The programme has the capability for performing 3 D mapping of the backscattered
electrons. Measurements of the percentage of the reflected current are depending on the …