Enhanced photoresponse of conformal TiO2/Ag nanorod array-based Schottky photodiodes fabricated via successive glancing angle and atomic layer deposition
A Haider, H Cansizoglu, MF Cansizoglu… - Journal of Vacuum …, 2015 - pubs.aip.org
In this study, the authors demonstrate a proof of concept nanostructured photodiode
fabrication method via successive glancing angle deposition (GLAD) and atomic layer
deposition (ALD). The fabricated metal-semiconductor nanorod (NR) arrays offer enhanced
photoresponse compared to conventional planar thin-film counterparts. Silver (Ag) metallic
NR arrays were deposited on Ag-film/Si templates by utilizing GLAD. Subsequently, titanium
dioxide (TiO 2) was deposited conformally on Ag NRs via ALD. Scanning electron …
fabrication method via successive glancing angle deposition (GLAD) and atomic layer
deposition (ALD). The fabricated metal-semiconductor nanorod (NR) arrays offer enhanced
photoresponse compared to conventional planar thin-film counterparts. Silver (Ag) metallic
NR arrays were deposited on Ag-film/Si templates by utilizing GLAD. Subsequently, titanium
dioxide (TiO 2) was deposited conformally on Ag NRs via ALD. Scanning electron …
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