[PDF][PDF] Fluid damping of an electrostatic actuator for optical switching applications

KY Yasumura, JD Grade… - Proc. Solid-State Sensor …, 2002 - scholar.archive.org
KY Yasumura, JD Grade, H Jerman
Proc. Solid-State Sensor, Actuator and Microsystems Workshop, 2002scholar.archive.org
ABSTRACT A 1× 4 optical switch has been fabricated using a micromachined rotary actuator
and commercially available miniature optics. This switch features an electrostatic actuator
and a separately fabricated out-of-plane mirror. An important characteristic of such a device
is its switching speed. Improved switching time can be obtained by damping the
fundamental mode of motion to reduce the effect of ringing when the switch output is
changed to a different fiber. In addition, damping the motor motion will improve the switch's …
Abstract
A 1× 4 optical switch has been fabricated using a micromachined rotary actuator and commercially available miniature optics. This switch features an electrostatic actuator and a separately fabricated out-of-plane mirror. An important characteristic of such a device is its switching speed. Improved switching time can be obtained by damping the fundamental mode of motion to reduce the effect of ringing when the switch output is changed to a different fiber. In addition, damping the motor motion will improve the switch’s immunity to externally applied accelerations. One means to passively damp the actuator modes of motion is to use a damping fluid with a viscosity greater than air (190 uP). Switching times of~ 1 msec have been obtained for a fluid filled switch with less than 0.5 dB insertion loss.
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