Fully integrated pitch-matched AlScN PMUT-on-CMOS array for high resolution Ultrasound Images
This article presents a fully integrated pitch-matched piezoelectric micromachined ultrasonic
transducers (PMUTs)-on-CMOS array with high potential in catheter-based ultrasound
imaging systems and capabilities to obtain resolutions under. The system-on-chip (SoC)
consists of AlScN PMUTs connected in a 1-D configuration where the six external rows are
used to generate the acoustic pressure through three high-voltage (HV)-pulser CMOS
circuits, and the central row is used to sense the incoming ultrasound wave which will be …
transducers (PMUTs)-on-CMOS array with high potential in catheter-based ultrasound
imaging systems and capabilities to obtain resolutions under. The system-on-chip (SoC)
consists of AlScN PMUTs connected in a 1-D configuration where the six external rows are
used to generate the acoustic pressure through three high-voltage (HV)-pulser CMOS
circuits, and the central row is used to sense the incoming ultrasound wave which will be …
This article presents a fully integrated pitch-matched piezoelectric micromachined ultrasonic transducers (PMUTs)-on-CMOS array with high potential in catheter-based ultrasound imaging systems and capabilities to obtain resolutions under . The system-on-chip (SoC) consists of AlScN PMUTs connected in a 1-D configuration where the six external rows are used to generate the acoustic pressure through three high-voltage (HV)-pulser CMOS circuits, and the central row is used to sense the incoming ultrasound wave which will be amplified by a low-noise amplifier (LNA) CMOS amplifier. The experimental verification in a liquid environment gave, as a first result, a peak frequency of 7.7 MHz with a normalized pressure (ST) of 1.98 *mm* and receiving sensitivity (SR) of 3.3 V/MPa, respectively, competitive sensitivities in comparison to the state-of-the-art. In the second part, ultrasonic imaging for different wires with a minimum diameter of was demonstrated as expected from numerical simulations. The system’s performance for ultrasound images was evaluated considering the product of the area and the resolution at 1 mm, giving competitive values compared with other reported ultrasound systems for catheter-based medical ultrasound imaging and the only one providing monolithic integration with the CMOS front-end circuitry.
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