In this report, the galvanic corrosion inhibition between Cu and Ru metal films is studied,
based on bonding orbital theory, using pyridinecarboxylic acid groups which show different
affinities depending on the electron configuration of each metal resulting from a π-
backbonding. The sp2 carbon atoms adjacent to nitrogen in the pyridine ring provide π-
acceptor which forms a complex with filled d-orbital of native oxides on Cu and Ru metal
film. The difference in the d-orbital electron density of each metal oxide leads to different π …

ScholarWorks@Hanyang University: Galvanic corrosion inhibition from the aspect of
bonding orbital theory in Cu/Ru barrier metal chemical mechanical planarization(CMP) …
Galvanic corrosion inhibition from the aspect of bonding orbital theory in Cu/Ru barrier
metal chemical mechanical planarization(CMP) … You may not copy or re-distribute this
material in whole or in part without the prior written consent of Clarivate Analytics. …