Gas discharge devices generating the directed fluxes of off-electrode plasma
NL Kazanskiy, VA Kolpakov, VV Podlipnov - Vacuum, 2014 - Elsevier
A new approach toward the generation of wide-format directed fluxes of low-temperature
plasma outside the interelectrode space and a corresponding gas discharge device to be
used for the formation of micro-and nano-sized diffraction patterns on wide-format wafers
have been proposed based on the analysis results of gas discharge devices that generate
the ion–electron beams under high-voltage gas discharge.
plasma outside the interelectrode space and a corresponding gas discharge device to be
used for the formation of micro-and nano-sized diffraction patterns on wide-format wafers
have been proposed based on the analysis results of gas discharge devices that generate
the ion–electron beams under high-voltage gas discharge.
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