Growth of zircone on nanoporous alumina using molecular layer deposition

RA Hall, SM George, Y Kim, W Hwang, ME Samberg… - JOM, 2014 - Springer
Molecular layer deposition (MLD) is a sequential and self-limiting process that may be used
to create hybrid organic/inorganic thin films from organometallic precursors and organic
alcohol precursors. In this study, films of a zirconium-containing hybrid organic/inorganic
polymer known as zircone were grown on nanoporous alumina using MLD. Scanning
electron microscopy data showed obliteration of the pores in zircone-coated nanoporous
alumina. An in vitro cell viability study indicated that the growth of human epidermal …
Abstract
Molecular layer deposition (MLD) is a sequential and self-limiting process that may be used to create hybrid organic/inorganic thin films from organometallic precursors and organic alcohol precursors. In this study, films of a zirconium-containing hybrid organic/inorganic polymer known as zircone were grown on nanoporous alumina using MLD. Scanning electron microscopy data showed obliteration of the pores in zircone-coated nanoporous alumina. An in vitro cell viability study indicated that the growth of human epidermal keratinocytes was the greatest on zircone-coated nanoporous alumina than on uncoated nanoporous alumina. Our results suggest that MLD may be used to create biocompatible coatings for use in many types of medical devices.
Springer
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