Heteroepitaxial diamond growth on (100) silicon
X Jiang, CP Klages - Diamond and Related Materials, 1993 - Elsevier
Highly oriented diamond films have been deposited on mirror-polished single-crystal (100)
silicon by microwave plasma chemical vapour deposition. The crystallites are grown with
their (001) planes parallel to silicon (001) and their [110] directions parallel to silicon [110],
as shown by scanning electron microscopy and X-ray diffraction analysis.
silicon by microwave plasma chemical vapour deposition. The crystallites are grown with
their (001) planes parallel to silicon (001) and their [110] directions parallel to silicon [110],
as shown by scanning electron microscopy and X-ray diffraction analysis.
以上显示的是最相近的搜索结果。 查看全部搜索结果