A new approach of self-compliance bipolar switching of tantalum embedded amorphous
oxide for highly reliable and uniform switching was investigated. Based on analytic results,
the formation of a metallic tantalum embedded amorphous oxide film was confirmed. Robust
characteristics of over cycles with no change at both resistance states under voltage pulses
were achieved due to the self-compliance function, which originated from the limitation of
current by metallic ohmic load resistance. In addition, an oxygen plasma pulse method for …