Nanoimprint lithographies (NIL) are very promising for NIL applications on flexible plastic
films. In this paper we present some studies and developments of the imprint of polyethylene
naphthalate (PEN) films. Different NIL processes are developed successfully; they
correspond to the imprint of different chemical phases of the material: semicrystalline,
amorphous, and melt. The thermal properties of the film are analyzed, and related to imprint
results, which demonstrate that high reproducibility and uniformity are obtained. Moreover …