Influence of annealing temperature on structural and optical properties of ZnO: In thin films prepared by ultrasonic spray technique

S Benramache, B Benhaoua - Superlattices and Microstructures, 2012 - Elsevier
Transparent conducting indium doped zinc oxide was deposited on glass substrate by
ultrasonic spray method. The In doped ZnO samples with indium concentration of 3wt.%
were deposited at 300, 350 and 400° C with 2min of deposition time. The effects of substrate
temperature and annealing temperature on the structural, electrical and optical properties
were examined. The DRX analyses indicated that In doped ZnO films have polycrystalline
nature and hexagonal wurtzite structure with (002) preferential orientation and the maximum …
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