… The slider is attached to the flexure. The … GMR sensors are very much smaller in size than
the MR sensors. They can … It has been discussed that the use of a second micro-actuator in a …

… been proposed: actuated suspension, the actuated slider, and the … than the stiffness of the
flexure springs needed to hold the … the resolution of the built-in, tunneling-current sensor (of the …

… of the micro-transducers, the micro-actuator only. Successful … the SU-8 polymer suspended
microstructures were grown on … Thus, the specimens should not be subject to any bending or …

… at least one of the roles such as sensor, actuator, or control … 76 4.9 CMA profiles using
different flexure hinges connecting … In that actuator system, the micro-actuator is capable of high-…

… of integration include increased functionality of sensor and … The actuated suspension/gimbal/slider
assembly has a large … undesired motions such as in-plane bending and yaw. By …

… An excellent overview of a variety of micro actuator … sensors [161] [163] [164] are a good
example of a transducer … (eg, a car with its rubber tires and suspension) if the spring stretches by …