Integration of bottom electrode in Y-cut lithium niobate thin films for high electromechanical coupling and high capacitance per unit area MEMS resonators
2017 IEEE 30th International Conference on Micro Electro …, 2017•ieeexplore.ieee.org
This paper reports the integration of a bottom electrode in thin films of Y-cut lithium niobate
(LN) on silicon to demonstrate high performance lamb-wave (S0 mode) and thickness-shear-
mode (TSM) resonators. The LN resonator is sandwiched between top and bottom
electrodes and attained high coupling (kt 2)> 6% when excited in S0 mode and> 30% when
excited in TSM. The reported devices possess capacitance per unit area of 0.4 fF/um 2,
which is 30 times that of X-cut LN and 5 times that of AlN resonators. This demonstration …
(LN) on silicon to demonstrate high performance lamb-wave (S0 mode) and thickness-shear-
mode (TSM) resonators. The LN resonator is sandwiched between top and bottom
electrodes and attained high coupling (kt 2)> 6% when excited in S0 mode and> 30% when
excited in TSM. The reported devices possess capacitance per unit area of 0.4 fF/um 2,
which is 30 times that of X-cut LN and 5 times that of AlN resonators. This demonstration …
This paper reports the integration of a bottom electrode in thin films of Y-cut lithium niobate (LN) on silicon to demonstrate high performance lamb-wave (S0 mode) and thickness-shear-mode (TSM) resonators. The LN resonator is sandwiched between top and bottom electrodes and attained high coupling (kt 2 ) > 6% when excited in S0 mode and > 30% when excited in TSM. The reported devices possess capacitance per unit area of 0.4 fF/um 2 , which is 30 times that of X-cut LN and 5 times that of AlN resonators. This demonstration enables MEMS designers to fully harness the high coupling of thin LN films, which can have a transformative impact on reconfigurable and ultra-low-power communication systems.
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