Ionized physical vapor deposition of integrated circuit interconnects
J Hopwood - Physics of Plasmas, 1998 - pubs.aip.org
Interconnects, once the technological backwater of integrated circuit technology, now
dominate integrated circuit cost and performance. As much as 90 percent of the signal delay
time in future integrated circuit designs will be due to the interconnection of semiconductor
devices while the remaining 10 percent is due to transistor-related delay. This shifts the
thrust of critical research toward an improved understanding of interconnect science and
technology. Shrinking circuit geometries will require high aspect ratio (AR) vias to …
dominate integrated circuit cost and performance. As much as 90 percent of the signal delay
time in future integrated circuit designs will be due to the interconnection of semiconductor
devices while the remaining 10 percent is due to transistor-related delay. This shifts the
thrust of critical research toward an improved understanding of interconnect science and
technology. Shrinking circuit geometries will require high aspect ratio (AR) vias to …
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