Frequency response behavior of microcantilever is analytically and experimentally
investigated in amplitude modulation Atomic Force Microscopy (AFM). AFM microcantilever
probe is modeled as a continuous beam, and tip-sample interaction force is considered to
include both attractive and repulsive force regimes. The developed model is compared with
the linear lumped-parameters model that has been extensively used in the literature so far.
Experimental measurements are also provided for the frequency response of a typical …