Liquid operable AlN PMUT with high output pressure capabilities
E Ledesma, I Zamora, V Tzanov… - 2019 IEEE …, 2019 - ieeexplore.ieee.org
2019 IEEE International Ultrasonics Symposium (IUS), 2019•ieeexplore.ieee.org
Two piezoelectric micromachined ultrasonic transducers (PMUTs) with a mode shape like a
free membrane and a resonance frequency around 7 MHz in liquid environment are
proposed in this paper. Here we evaluate the influence of linear holes (two or four holes) in
the movement and consequently in the output pressure. FEM simulations show how the
linear holes increase the membrane velocity at least 1.4× factor in relation with the clamped
PMUT. Also, the experimental verification in fluorinert (FC-70) allows to demonstrate the …
free membrane and a resonance frequency around 7 MHz in liquid environment are
proposed in this paper. Here we evaluate the influence of linear holes (two or four holes) in
the movement and consequently in the output pressure. FEM simulations show how the
linear holes increase the membrane velocity at least 1.4× factor in relation with the clamped
PMUT. Also, the experimental verification in fluorinert (FC-70) allows to demonstrate the …
Two piezoelectric micromachined ultrasonic transducers (PMUTs) with a mode shape like a free membrane and a resonance frequency around 7 MHz in liquid environment are proposed in this paper. Here we evaluate the influence of linear holes (two or four holes) in the movement and consequently in the output pressure. FEM simulations show how the linear holes increase the membrane velocity at least 1.4× factor in relation with the clamped PMUT. Also, the experimental verification in fluorinert (FC-70) allows to demonstrate the capability to use them in liquid with an output surface pressure in the range of 300 Pa/V at 7 MHz.
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