Low on-resistance normally-off GaN double-channel metal–oxide–semiconductor high-electron-mobility transistor

J Wei, S Liu, B Li, X Tang, Y Lu, C Liu… - IEEE Electron …, 2015 - ieeexplore.ieee.org
J Wei, S Liu, B Li, X Tang, Y Lu, C Liu, M Hua, Z Zhang, G Tang, KJ Chen
IEEE Electron Device Letters, 2015ieeexplore.ieee.org
A low on-resistance normally-off GaN double-channel metal–oxide–semiconductor high-
electron-mobility transistor (DC-MOS-HEMT) is proposed and demonstrated in this letter,
which features a 1.5-nm AlN insertion layer (ISL) located 6 nm below the conventional
barrier/GaN interface, forming a second channel at the interface between the AlN-ISL and
the underlying GaN. With gate recess terminated at the upper channel, normally-off
operation was obtained with of+ 0.5 V at/mm or+ 1.4 V from the linear extrapolation of the …
A low on-resistance normally-off GaN double-channel metal–oxide–semiconductor high-electron-mobility transistor (DC-MOS-HEMT) is proposed and demonstrated in this letter, which features a 1.5-nm AlN insertion layer (ISL) located 6 nm below the conventional barrier/GaN interface, forming a second channel at the interface between the AlN-ISL and the underlying GaN. With gate recess terminated at the upper channel, normally-off operation was obtained with of +0.5 V at /mm or +1.4 V from the linear extrapolation of the transfer curve. The lower heterojunction channel is separated from the etched surface in the gate region, thereby maintaining its high field-effect mobility with a peak value of 1801 cm 2 /( ). The on-resistance is as small as 6.9 for a DC-MOS-HEMT with , and the maximum drain current is 836 mA/mm. A high breakdown voltage (>700 V) and a steep subthreshold swing of 72 mV/decade are also obtained.
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