Meniscus-mode: A novel operation mechanism for signal amplification in capacitive micromachined ultrasonic transducers

HH Tawfik, N Singh, MY Elsayed, F Nabki… - Sensors and Actuators A …, 2021 - Elsevier
Sensors and Actuators A: Physical, 2021Elsevier
This paper presents a novel operation mechanism for ultrasonic testing in-water. The
mechanism employs the surface-tension forces between the water and ultrasonic probe
surfaces to cause an elongation (meniscus) of the water column and thus focuses the
ultrasonic beam. The proposed meniscus-mode operation mechanism exploits this
phenomenon to amplify the ultrasonic signal in comparison to the traditional fully-immersed
setup. The visualization of the proposed mechanism is presented with the aid of finite …
Abstract
This paper presents a novel operation mechanism for ultrasonic testing in-water. The mechanism employs the surface-tension forces between the water and ultrasonic probe surfaces to cause an elongation (meniscus) of the water column and thus focuses the ultrasonic beam. The proposed meniscus-mode operation mechanism exploits this phenomenon to amplify the ultrasonic signal in comparison to the traditional fully-immersed setup. The visualization of the proposed mechanism is presented with the aid of finite-element simulations. In addition, the ultrasonic signal amplification due to operation in meniscus-mode is demonstrated experimentally using a capacitive micromachined ultrasonic transducer (CMUT) fabricated in PolyMUMPs technology. A factor of ∼2.24× improvement in the ultrasonic signal strength is measured.
Elsevier
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