Modelling of a charge control method for capacitive MEMS
P Giounanlis, E Blokhina, O Feely… - … on Circuit Theory …, 2013 - ieeexplore.ieee.org
2013 European Conference on Circuit Theory and Design (ECCTD), 2013•ieeexplore.ieee.org
Charging of dielectric materials in microelectrome-chanical systems (MEMS) actuated
electrostatically is a major reliability issue. In our previous work we proposed a feedback
loop control method that is implemented as a circuit and that allows smart actuation for
switches and varactors. In this paper we discuss system-level modeling of MEMS devices
including all aspects of the system: proposed control method, charging dynamics and
realistic models of the mechanical components of MEMS.
electrostatically is a major reliability issue. In our previous work we proposed a feedback
loop control method that is implemented as a circuit and that allows smart actuation for
switches and varactors. In this paper we discuss system-level modeling of MEMS devices
including all aspects of the system: proposed control method, charging dynamics and
realistic models of the mechanical components of MEMS.
Charging of dielectric materials in microelectrome-chanical systems (MEMS) actuated electrostatically is a major reliability issue. In our previous work we proposed a feedback loop control method that is implemented as a circuit and that allows smart actuation for switches and varactors. In this paper we discuss system-level modeling of MEMS devices including all aspects of the system: proposed control method, charging dynamics and realistic models of the mechanical components of MEMS.
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