Multi-component (Al, Cr, Nb, Y, Zr) N thin films by reactive magnetron sputter deposition for increased hardness and corrosion resistance
K von Fieandt, EM Paschalidou, A Srinath, P Soucek… - Thin Solid Films, 2020 - Elsevier
Multi-component nitride thin films in the Al–Cr–Nb–Y–Zr system with non-equimolar
composition have been deposited by reactive dc magnetron sputtering. The substrate
temperature and substrate bias have been varied, from room temperature to 700° C and
from 0 to− 200 V respectively. The relationship between these varied growth conditions on
the structure, morphology, mechanical and corrosion properties of the films have been
probed. All films consisted of a single solid solution with a NaCl-type structure, as shown by …
composition have been deposited by reactive dc magnetron sputtering. The substrate
temperature and substrate bias have been varied, from room temperature to 700° C and
from 0 to− 200 V respectively. The relationship between these varied growth conditions on
the structure, morphology, mechanical and corrosion properties of the films have been
probed. All films consisted of a single solid solution with a NaCl-type structure, as shown by …
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