Nano surface finish has become an important parameter in the semiconductor, optical,
electrical and mechanical industries. The materials used in these industries are classified as
difficult to machine materials such as ceramics, glasses and silicon wafers. Machining of
these materials up to nano accuracy is a great challenge in the manufacturing industry.
Finishing of micro components such as micro-moulds, micro-lenses and micro-holes need
different processing techniques. Conventional finishing methods used so far become almost …