With its host of outstanding material properties, single-crystal diamond is an attractive
material for nanomechanical systems. Here, the mechanical resonance characteristics of
freestanding, single-crystal diamond nanobeams fabricated by an angled-etching
methodology are reported. Resonance frequencies displayed evidence of significant
compressive stress in doubly clamped diamond nanobeams, while cantilever resonance
modes followed the expected inverse-length-squared trend. Q-factors on the order of 10 4 …