Nanoscale InN clusters and compositional inhomogeneities in InGaN epitaxial layers quantified by tip-enhanced Raman scattering
We investigate the compositional homogeneity of InGaN thin films with a high In content
grown by migration-enhanced plasma-assisted metal-organic chemical vapor deposition.
Micro-Raman spectroscopy and tip-enhanced Raman spectroscopy (TERS) are used to
analyze the local InGaN composition on the micro-and nanoscale. Based on conventional
micro-Raman mapping, the InGaN composition for all samples appears uniform but shows
indications for intrinsic phase separations. TERS, a nanoscopic technique with a high spatial …
grown by migration-enhanced plasma-assisted metal-organic chemical vapor deposition.
Micro-Raman spectroscopy and tip-enhanced Raman spectroscopy (TERS) are used to
analyze the local InGaN composition on the micro-and nanoscale. Based on conventional
micro-Raman mapping, the InGaN composition for all samples appears uniform but shows
indications for intrinsic phase separations. TERS, a nanoscopic technique with a high spatial …
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