Grating based X-ray phase contrast imaging is on the verge of being applied in clinical
settings. To achieve this goal, compact setups with high sensitivity and dose efficiency are
necessary. Both can be increased by eliminating unwanted absorption in the beam path,
which is mainly due to the grating substrates. Fabrication of gratings via deep X-ray
lithography can address this issue by replacing the commonly used silicon substrate with
materials with lower X-ray absorption that fulfill certain boundary conditions. Gratings were …