On the evaluation of damping in MEMS in the slip–flow regime
A Frangi, G Spinola, B Vigna - International journal for …, 2006 - Wiley Online Library
A Frangi, G Spinola, B Vigna
International journal for numerical methods in engineering, 2006•Wiley Online LibraryThe analysis of fluid damping in micro‐electro‐mechanical systems (MEMS) is addressed. A
mixed fast multipole boundary element method based on both velocity and traction integral
equations is employed and adapted in order to account for slip boundary conditions. The
formulation presented is applied to the analysis of a biaxial accelerometer and validated
with experimental results. Copyright© 2006 John Wiley & Sons, Ltd.
mixed fast multipole boundary element method based on both velocity and traction integral
equations is employed and adapted in order to account for slip boundary conditions. The
formulation presented is applied to the analysis of a biaxial accelerometer and validated
with experimental results. Copyright© 2006 John Wiley & Sons, Ltd.
Abstract
The analysis of fluid damping in micro‐electro‐mechanical systems (MEMS) is addressed. A mixed fast multipole boundary element method based on both velocity and traction integral equations is employed and adapted in order to account for slip boundary conditions. The formulation presented is applied to the analysis of a biaxial accelerometer and validated with experimental results. Copyright © 2006 John Wiley & Sons, Ltd.
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