Oriented CVD diamond films: twin formation, structure and morphology
C Wild, R Kohl, N Herres, W Müller-Sebert… - Diamond and Related …, 1994 - Elsevier
We studied three types of oriented diamond film:(i) strongly fibre textured films,(ii) epitaxially
textured films grown on {100} Si, and (iii) homoepitaxial films. The samples were prepared
using microwave plasma assisted chemical vapour deposition from CH 4 single bondH 2
gas mixtures under various growth conditions. In all cases the structure and morphology of
the films are shown to depend on a growth parameter α which is given by the relative growth
rates on {100} and {111} facets, α=(V {in100} V {in111})√ 3. In the case of fibre textured …
textured films grown on {100} Si, and (iii) homoepitaxial films. The samples were prepared
using microwave plasma assisted chemical vapour deposition from CH 4 single bondH 2
gas mixtures under various growth conditions. In all cases the structure and morphology of
the films are shown to depend on a growth parameter α which is given by the relative growth
rates on {100} and {111} facets, α=(V {in100} V {in111})√ 3. In the case of fibre textured …
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