A thermopnuematic peristaltic micropump for controlling micro litters of fluid was designed and fabricated from multi-stack PDMS structure on glass substrate. Pump structure consists of inlet and outlet, microchannel, three thermopneumatic actuation chambers, and three heaters. In microchannel, fluid is controlled and pumped by peristaltic motion of actuation diaphragm. Actuation diaphragm can bend up and down by exploiting air expansion that is induced by increasing heater temperature. The micropump characteristics were measured as a function of applied voltage and frequency. The flow rate was determined by periodically recording the motion of fluid at Nanoport output and computing flow volume from height difference between consecutive records. From the experiment, an optimum flow rate of 0.82 µl/min is obtained under 14 V three-phase input voltages at 0.033 Hz operating frequency.