… processing of metal oxide thin films have increased notably. This has enabled the direct
integration of metal oxide … of the use of these processes with reduced energy consumption. More …

… Atomic layer deposition technique is able to grow conformal thin films over high aspect ratio
structures. This article reviews the various aspects of oxides grown by this method including …

… oxide (TCO) and in gas sensor devices. This paper compares ZnO films grown using two
methods designed for the production of … from ZnO thin films prepared by the sol–gel method, as …

… method to produce nanocrystalline thin films of tungsten oxide. The most important factor
influencing the shape and microstructure of the tungstite crystallites in the deposited films …

… The crystalline structure of bismuth oxide films strongly depends on the nucleation and growth
processes at film–substrate interface and is mainly determined by the crystalline structure …

… -cost, versatile approach for processing of thin and ultrathin ferroelectric films, as well as short
… This review discusses the state of the art in the processing of ferroelectric oxide thin films …

… oxide thin films find diverse applications as catalysts, gas sensors, and electrochromic devices.
Such films are produced … alternative method for the production of molybdenum oxide films …

… ALD is a gas-phase thin-film deposition method that is unique because the film growth
proceeds through self-limiting surface reactions (10–13). As a consequence, ALD offers excellent …

… , as many thin films share a number of features in all steps of the production process,
characterization, … Oxide thin films can also be deposited if oxygen is introduced in the chamber as …

… principles of thin-film technology , including deposition processes, … This method is most
commonly used where oxide films are … at the substrate to form the oxide. The impingement ratio K, …