… of zirconium oxide thin films deposited by dc reactive magnetron sputtering. The thin film …
The crystalline transitions of zirconium oxide are highly deposition process, parameter and …

… growth involving the deposition and aggregation of nanosized primary particles produced
during the CVD process. A mismatch between the experimental results obtained here and the …

… This work presents the analysis of ZrO 2 thin films obtained by non-alkoxide sol-gel method
at different annealing temperatures. The results reported here show the relation between …

… The crystal structure is dependent on preparation method. The sol–gel process allows
production of thin films with controllable microstructure [2, 22] and thickness [4, 8, 23, 26]. Different …

… Thin films of zirconium oxide have been deposited onto glass and Si(100) substrates at … the
deposition process affects the optical and structural properties of zirconium oxide films. In Sec…

… and zirconium oxide films were … , zirconium and aluminum oxide were also prepared. Atomic
force microscopy was used to characterize the surface morphology of 10–100nm thick films …

… used to grow zirconium oxide thin films and their application to … sol–gel process to synthesize
hydrated zirconium oxide. They investigated that the properties of hydrated zirconium oxide …

… We report a deposition method for room-temperature preparation of ZrO 2 thin film using an
… will hydrolyze and condense to generate zirconium oxide or oxyhydroxide depending on …

… High-dielectric constant metal oxide thin films have attracted much attention lately for
their potential in replacing SiO2 silicon nitride or oxynitride1–6 as an insulator in metal–oxide–…

… a more economical and easier method for obtaining ZrO 2 thin films at lower temperature,
unlike the … Zirconium oxide (ZrO 2 ), which is also known as zirconia, has become prominent in …