RF passive components based on aluminum nitride cross-sectional Lamé-mode MEMS resonators
C Cassella, G Chen, Z Qian… - IEEE Transactions on …, 2016 - ieeexplore.ieee.org
IEEE Transactions on Electron Devices, 2016•ieeexplore.ieee.org
This paper presents a new class of monolithic integrated RF passive components based on
the recently developed aluminum nitride (AlN) MEMS cross-sectional Lamé-mode resonator
(CLMR) technology. First, we experimentally demonstrate a 920-MHz CLMR showing the
values of electromechanical coupling coefficient (kt 2) and quality factor (Q load) in excess of
6.2% and 1750, respectively. To the best our knowledge, the resulting figure of merit (= Q· kt
2), in excess of 108, is the highest ever reported for AlN-based piezoelectric resonators …
the recently developed aluminum nitride (AlN) MEMS cross-sectional Lamé-mode resonator
(CLMR) technology. First, we experimentally demonstrate a 920-MHz CLMR showing the
values of electromechanical coupling coefficient (kt 2) and quality factor (Q load) in excess of
6.2% and 1750, respectively. To the best our knowledge, the resulting figure of merit (= Q· kt
2), in excess of 108, is the highest ever reported for AlN-based piezoelectric resonators …
This paper presents a new class of monolithic integrated RF passive components based on the recently developed aluminum nitride (AlN) MEMS cross-sectional Lamé-mode resonator (CLMR) technology. First, we experimentally demonstrate a 920-MHz CLMR showing the values of electromechanical coupling coefficient (k t 2 ) and quality factor (Q load ) in excess of 6.2% and 1750, respectively. To the best our knowledge, the resulting figure of merit (= Q·k t 2 ), in excess of 108, is the highest ever reported for AlN-based piezoelectric resonators using interdigitated metallic electrodes (IDTs) and operating in the same frequency range. Second, we report the measured performance of an 870-MHz ladder filter, synthesized using three degenerate CLMRs. This device shows the values of fractional bandwidth (BW 3dB ) in excess of 3.8% and an insertion loss of ~1.5 dB. Finally, we report the performance of the first piezoelectric transformer (PT) based on the CLMR technology. This device, dubbed “cross-sectional Lamé-mode transformer,” exploits the high-k t 2 of the CLMR technology to achieve high values of open-circuit voltage-gains (G v ) in excess of 39. To the best of our knowledge, such a high G v -value is the highest ever reported for MEMS-based PTs operating in the microwave frequency range.
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