Recessed gate GaN MODFETs

J Burm, WJ Schaff, GH Martin, LF Eastman… - Solid-State …, 1997 - Elsevier
… with the improvements in performance achieved through a recessed gate. … of MODFETs
were fabricated on GaN/A1027Ga073 heterostructure, one with and one without a recessed gate

Recessed gate AlGaN/GaN modulation-doped field-effect transistors on sapphire

T Egawa, H Ishikawa, M Umeno, T Jimbo - Applied Physics Letters, 2000 - pubs.aip.org
… /GaN MODFET with the gate length of 2.1 μm on sapphire by use of the high-quality
AlGaN/GaN heterostructure and recessed gate … 74N/GaN MODFET grown on a (0001) sapphire …

Recessed-gate enhancement-mode GaN MOSFETs with a double-insulator gate providing 10-MHz switching operation

J Kashiwagi, T Fujiwara, M Akutsu, N Ito… - IEEE electron device …, 2013 - ieeexplore.ieee.org
recessed-gate GaN MOSFET with a double-insulator gate structure. The measurements were
performed in pulsed mode, and gate… 2(b) for the same GaN MOSFET that was used in Fig. 2…

Demonstration of normally-off recess-gated AlGaN/GaN MOSFET using GaN cap layer as recess mask

Z Xu, J Wang, J Liu, C Jin, Y Cai, Z Yang… - IEEE Electron …, 2014 - ieeexplore.ieee.org
… -gated AlGaN/GaN MOSFET has been demonstrated with a novel method using … gate
recess process for realization of normally-off recess-gated AlGaN/GaN MOSFET [9]. The …

Selective area growth: A promising way for recessed gate GaN MOSFET with high quality MOS interface

Y Zheng, F Yang, L He, Y Yao, Z Shen… - IEEE Electron …, 2016 - ieeexplore.ieee.org
… However, such advantage was not observed in our previous E-mode GaN MOSFET [13] …
E-mode GaN recessed gate MOSFET was demonstrated successfully with negligible gate

Normally-off GaN recessed-gate MOSFET fabricated by selective area growth technique

Y Yao, Z He, F Yang, Z Shen, J Zhang, Y Ni… - Applied Physics …, 2013 - iopscience.iop.org
… In this work, a normally-off GaN recessed-gate MOSFET was … /GaN heterostructure was
selectively grown on a semi-insulating GaN/Si (SI-GaN/Si) template to naturally form a recessed

High-voltage normally-off recessed tri-gate GaN power MOSFETs with low on-resistance

M Zhu, J Ma, L Nela, C Erine… - IEEE Electron Device …, 2019 - ieeexplore.ieee.org
… -off GaN-on-Si MOSFETs based on the combination of tri-gate with a short barrier recess to
… The trigate structure offered excellent channel control, enhancing VTH from +0.3 V for the …

Through recess and regrowth gate technology for realizing process stability of GaN-based gate injection transistors

H Okita, M Hikita, A Nishio, T Sato… - … on Electron Devices, 2017 - ieeexplore.ieee.org
… In GaN-based HFETs, gate recess technology is significant for realizing both normally OFF …
/InGaAs/InP MODFET’s with uniform threshold voltage obtained by selective wet gate recess,” …

High-Performance Normally-Off MOSFET Using a Wet Etching-Based Gate Recess Technique

Y Wang, M Wang, B Xie, CP Wen… - IEEE Electron …, 2013 - ieeexplore.ieee.org
… -OFF GaN MOSFET with AlGaN/GaN access regions using a digital gate-recess technique
… This digital recess technique is used to completely remove the barrier layer with good …

Recessed gate AlGaN/GaN MODFET on sapphire grown by MOCVD

T Egawa, H Ishikawa, T Jimbo… - … Devices Meeting 1999 …, 1999 - ieeexplore.ieee.org
… MOCVDgrown AlGaN/GaN MODFET on sapphire using recessed gate process. The electron
mobility and the sheet carrier density in the AlGaN/GaN heterostructure were 740 cm2Nes …