Recessed gate GaN MODFETs
J Burm, WJ Schaff, GH Martin, LF Eastman… - Solid-State …, 1997 - Elsevier
… with the improvements in performance achieved through a recessed gate. … of MODFETs
were fabricated on GaN/A1027Ga073 heterostructure, one with and one without a recessed gate…
were fabricated on GaN/A1027Ga073 heterostructure, one with and one without a recessed gate…
Recessed gate AlGaN/GaN modulation-doped field-effect transistors on sapphire
T Egawa, H Ishikawa, M Umeno, T Jimbo - Applied Physics Letters, 2000 - pubs.aip.org
… /GaN MODFET with the gate length of 2.1 μm on sapphire by use of the high-quality
AlGaN/GaN heterostructure and recessed gate … 74N/GaN MODFET grown on a (0001) sapphire …
AlGaN/GaN heterostructure and recessed gate … 74N/GaN MODFET grown on a (0001) sapphire …
Recessed-gate enhancement-mode GaN MOSFETs with a double-insulator gate providing 10-MHz switching operation
J Kashiwagi, T Fujiwara, M Akutsu, N Ito… - IEEE electron device …, 2013 - ieeexplore.ieee.org
… recessed-gate GaN MOSFET with a double-insulator gate structure. The measurements were
performed in pulsed mode, and gate… 2(b) for the same GaN MOSFET that was used in Fig. 2…
performed in pulsed mode, and gate… 2(b) for the same GaN MOSFET that was used in Fig. 2…
Demonstration of normally-off recess-gated AlGaN/GaN MOSFET using GaN cap layer as recess mask
Z Xu, J Wang, J Liu, C Jin, Y Cai, Z Yang… - IEEE Electron …, 2014 - ieeexplore.ieee.org
… -gated AlGaN/GaN MOSFET has been demonstrated with a novel method using … gate
recess process for realization of normally-off recess-gated AlGaN/GaN MOSFET [9]. The …
recess process for realization of normally-off recess-gated AlGaN/GaN MOSFET [9]. The …
Selective area growth: A promising way for recessed gate GaN MOSFET with high quality MOS interface
Y Zheng, F Yang, L He, Y Yao, Z Shen… - IEEE Electron …, 2016 - ieeexplore.ieee.org
… However, such advantage was not observed in our previous E-mode GaN MOSFET [13] …
E-mode GaN recessed gate MOSFET was demonstrated successfully with negligible gate …
E-mode GaN recessed gate MOSFET was demonstrated successfully with negligible gate …
Normally-off GaN recessed-gate MOSFET fabricated by selective area growth technique
Y Yao, Z He, F Yang, Z Shen, J Zhang, Y Ni… - Applied Physics …, 2013 - iopscience.iop.org
… In this work, a normally-off GaN recessed-gate MOSFET was … /GaN heterostructure was
selectively grown on a semi-insulating GaN/Si (SI-GaN/Si) template to naturally form a recessed …
selectively grown on a semi-insulating GaN/Si (SI-GaN/Si) template to naturally form a recessed …
High-voltage normally-off recessed tri-gate GaN power MOSFETs with low on-resistance
… -off GaN-on-Si MOSFETs based on the combination of tri-gate with a short barrier recess to
… The trigate structure offered excellent channel control, enhancing VTH from +0.3 V for the …
… The trigate structure offered excellent channel control, enhancing VTH from +0.3 V for the …
Through recess and regrowth gate technology for realizing process stability of GaN-based gate injection transistors
H Okita, M Hikita, A Nishio, T Sato… - … on Electron Devices, 2017 - ieeexplore.ieee.org
… In GaN-based HFETs, gate recess technology is significant for realizing both normally OFF …
/InGaAs/InP MODFET’s with uniform threshold voltage obtained by selective wet gate recess,” …
/InGaAs/InP MODFET’s with uniform threshold voltage obtained by selective wet gate recess,” …
High-Performance Normally-Off MOSFET Using a Wet Etching-Based Gate Recess Technique
… -OFF GaN MOSFET with AlGaN/GaN access regions using a digital gate-recess technique
… This digital recess technique is used to completely remove the barrier layer with good …
… This digital recess technique is used to completely remove the barrier layer with good …
Recessed gate AlGaN/GaN MODFET on sapphire grown by MOCVD
T Egawa, H Ishikawa, T Jimbo… - … Devices Meeting 1999 …, 1999 - ieeexplore.ieee.org
… MOCVDgrown AlGaN/GaN MODFET on sapphire using recessed gate process. The electron
mobility and the sheet carrier density in the AlGaN/GaN heterostructure were 740 cm2Nes …
mobility and the sheet carrier density in the AlGaN/GaN heterostructure were 740 cm2Nes …
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