Room temperature replication in spin on glass by nanoimprint technology
S Matsui, Y Igaku, H Ishigaki, J Fujita… - Journal of Vacuum …, 2001 - pubs.aip.org
A compact nanoimprint lithography (NIL) system using the driving power of a stepping motor
has been developed. Compared to a conventional NIL system with a hydraulic press, there
are some additional features of the NIL system such as compactness and low cost. We
propose the use of spin on glass (SOG) instead of PMMA to avoid thermal expansion and
demonstrate SOG patterns with 200 nm linewidths at room temperature replications using
the NIL system. The SOG patterns were transferred to gold metal using liftoff and to a silicon …
has been developed. Compared to a conventional NIL system with a hydraulic press, there
are some additional features of the NIL system such as compactness and low cost. We
propose the use of spin on glass (SOG) instead of PMMA to avoid thermal expansion and
demonstrate SOG patterns with 200 nm linewidths at room temperature replications using
the NIL system. The SOG patterns were transferred to gold metal using liftoff and to a silicon …