Structural, electrical and optical characteristics of Al-doped zinc oxide thin films deposited by reactive magnetron sputtering
M Zubkins, R Kalendarev, K Vilnis… - IOP conference series …, 2013 - iopscience.iop.org
IOP conference series: materials science and engineering, 2013•iopscience.iop.org
ZnO: Al (AZO) thin films on glass were deposited by DC reactive magnetron sputtering at
approximately 300 C substrate temperature. Structural, electrical and optical properties were
investigated as a function of oxygen flow. XRD data shows that AZO thin films are
polycrystalline with pronounced c-axis orientation and the grain size increasing with the
oxygen flow. The lowest achieved resistivity within the deposited set of samples was 7.6·
10− 4 Ωcm The transmittance of AZO films was above 80% at 550 run with the optical band …
approximately 300 C substrate temperature. Structural, electrical and optical properties were
investigated as a function of oxygen flow. XRD data shows that AZO thin films are
polycrystalline with pronounced c-axis orientation and the grain size increasing with the
oxygen flow. The lowest achieved resistivity within the deposited set of samples was 7.6·
10− 4 Ωcm The transmittance of AZO films was above 80% at 550 run with the optical band …
Abstract
ZnO: Al (AZO) thin films on glass were deposited by DC reactive magnetron sputtering at approximately 300 C substrate temperature. Structural, electrical and optical properties were investigated as a function of oxygen flow. XRD data shows that AZO thin films are polycrystalline with pronounced c-axis orientation and the grain size increasing with the oxygen flow. The lowest achieved resistivity within the deposited set of samples was 7.6· 10− 4 Ωcm The transmittance of AZO films was above 80% at 550 run with the optical band gap between 3.4 and 3.8 eV.
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