Surface acoustic wave characteristics of AlN thin films grown on a polycrystalline 3C-SiC buffer layer

SH Hoang, GS Chung - Microelectronic Engineering, 2009 - Elsevier
In this study, AlN thin films were deposited on a polycrystalline (poly) 3C-SiC buffer layer for
surface acoustic wave (SAW) applications using a pulsed reactive magnetron sputtering
system. AFM, XRD and FT-IR were used to analyze structural properties and the morphology
of the AlN/3C-SiC thin film. Suitability of the film in SAW applications was investigated by
comparing the SAW characteristics of an interdigital transducer (IDT)/AlN/3C-SiC structure
with the IDT/AlN/Si structure at 160MHz in the temperature range 30–150° C. These …
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