Surface Stoichiometry and Optical Properties of Cux–TiyCz Thin Films Deposited by Magnetron Sputtering

A Roy, AK Mukhopadhyay, SC Das, G Bhattacharjee… - Coatings, 2019 - mdpi.com
Ternary carbide in metal matrix composites constitute a big challenge in the industry, and in
this regard their surface treatment is one of the most important issues. Ternary carbide (Cu x
Ti y C z, where x, y and z are integers) thin films are synthesized by magnetron sputtering
and characterized with respect to the film depth. X-ray photoelectron spectroscopy (XPS) of
Cu-2 p and Ti-2 p peaks shows the associated shake-up satellite peaks at a smaller film
depth; the peak intensity is reduced at a higher depth. The relative intensity of Cu and Ti …

[引用][C] Surface stoichiometry and optical properties of Cux-TiyCz thin films deposited by magnetron sputtering. Coatings 9 (9)

A Roy - 2019
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