Synthesis and characterization of ZnO thin film grown by electron beam evaporation

DC Agarwal, RS Chauhan, A Kumar… - Journal of Applied …, 2006 - pubs.aip.org
Highly transparent, conducting, highly oriented, and almost single phase ZnO films have
been deposited by simple e-beam evaporation method, and the deposition parameters were
optimized. The films were prepared by (a) evaporation of ZnO at different substrate
temperatures and (b) evaporation of ZnO at room temperature and subsequent annealing of
the films in oxygen ambient at different temperatures. The characterizations of the film were
performed by optical absorption spectroscopy (UV-visible), Fourier transform infrared …
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