Temperature coefficient of resistance and thermal conductivity of Vanadium oxide 'Big Mac'sandwich structure
In this paper, we synthesize and characterize a thin film thermometer structure for infrared
microbolometers. The structure is composed of alternating multilayers of Vanadium
pentoxide (V 2 O 5), 25 nm, and Vanadium (V), 5 nm, thin films deposited by rf magnetron
and dc magnetron sputtering respectively and annealed for 20, 30 and 40 min at 300° C in
Nitrogen (N 2) atmosphere. The best achieved temperature coefficient of resistance (TCR)
was found to be− 2.57%/K for 40 min annealed samples. Moreover, we apply, for the first …
microbolometers. The structure is composed of alternating multilayers of Vanadium
pentoxide (V 2 O 5), 25 nm, and Vanadium (V), 5 nm, thin films deposited by rf magnetron
and dc magnetron sputtering respectively and annealed for 20, 30 and 40 min at 300° C in
Nitrogen (N 2) atmosphere. The best achieved temperature coefficient of resistance (TCR)
was found to be− 2.57%/K for 40 min annealed samples. Moreover, we apply, for the first …
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