Thermal conductivity of PVD TiAlN films using pulsed photothermal reflectance technique
XZ Ding, MK Samani, G Chen - Applied Physics A, 2010 - Springer
XZ Ding, MK Samani, G Chen
Applied Physics A, 2010•SpringerIn the present work, we have measured thermal-conductivity of industrial thin film TiAlN with
a thickness of around 3 μm. These films are used in machining industry for cutting tools in
order to increase their service life. A series of TiAlN coating with a different Al/Ti atomic ratio
were deposited on Fe-304 stainless steel (AISI304) substrate by a lateral rotating cathode
arc process. The samples were then coated with a 0.8 μm gold layer on top by magnetron
sputtering. We present the thermal-conductivity measurement of these samples using pulsed …
a thickness of around 3 μm. These films are used in machining industry for cutting tools in
order to increase their service life. A series of TiAlN coating with a different Al/Ti atomic ratio
were deposited on Fe-304 stainless steel (AISI304) substrate by a lateral rotating cathode
arc process. The samples were then coated with a 0.8 μm gold layer on top by magnetron
sputtering. We present the thermal-conductivity measurement of these samples using pulsed …
Abstract
In the present work, we have measured thermal-conductivity of industrial thin film TiAlN with a thickness of around 3 μm. These films are used in machining industry for cutting tools in order to increase their service life. A series of TiAlN coating with a different Al/Ti atomic ratio were deposited on Fe-304 stainless steel (AISI304) substrate by a lateral rotating cathode arc process. The samples were then coated with a 0.8 μm gold layer on top by magnetron sputtering. We present the thermal-conductivity measurement of these samples using pulsed photothermal reflectance (PPR) technique at room temperature. The thermal conductivity of the pure TiN coating is about 11.9 W/mK. A significant decrease in thermal conductivity was found with increasing Al/Ti atomic ratio. A minimum thermal conductivity of about 4.63 W/mK was obtained at the Al/Ti atomic ratio of around 0.72.
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