Toward the micromachined vibrating gyroscope using (111) silicon wafer process
Micromachining and Microfabrication Process Technology VII, 2001•spiedigitallibrary.org
The issues regarding structure design and fabrication in improving the performance of MVGs
are discussed. Although using (111) Si wafer with existing HARM process is appropriate,
some limitations on design and fabrication still exist. This study proposes a novel BELST
process that can improve the device performance as well as fabrication capability of the
existing techniques. The salient features of the process are described, and various design
concepts have been demonstrated from the fabrication results. According to the result, MVGs …
are discussed. Although using (111) Si wafer with existing HARM process is appropriate,
some limitations on design and fabrication still exist. This study proposes a novel BELST
process that can improve the device performance as well as fabrication capability of the
existing techniques. The salient features of the process are described, and various design
concepts have been demonstrated from the fabrication results. According to the result, MVGs …
The issues regarding structure design and fabrication in improving the performance of MVGs are discussed. Although using (111) Si wafer with existing HARM process is appropriate, some limitations on design and fabrication still exist. This study proposes a novel BELST process that can improve the device performance as well as fabrication capability of the existing techniques. The salient features of the process are described, and various design concepts have been demonstrated from the fabrication results. According to the result, MVGs with desired shape and thickness can easily be obtained using the developed BELST process.
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