Weak-beam dark-field electron tomography of dislocations in GaN
JS Barnard, J Sharp, JR Tong… - Journal of Physics …, 2006 - iopscience.iop.org
Journal of Physics: Conference Series, 2006•iopscience.iop.org
By combining weak-beam dark-field imaging with tomography, we have been able to
reconstruct the three-dimensional structure of dislocation arrays in GaN. With a mixture of
both threading and in-plane dislocations, owing to plastic relaxation of the film, we look at
how well each dislocation is reconstructed and what limits are imposed by way of dislocation
density and material anisotropy.
reconstruct the three-dimensional structure of dislocation arrays in GaN. With a mixture of
both threading and in-plane dislocations, owing to plastic relaxation of the film, we look at
how well each dislocation is reconstructed and what limits are imposed by way of dislocation
density and material anisotropy.
Abstract
By combining weak-beam dark-field imaging with tomography, we have been able to reconstruct the three-dimensional structure of dislocation arrays in GaN. With a mixture of both threading and in-plane dislocations, owing to plastic relaxation of the film, we look at how well each dislocation is reconstructed and what limits are imposed by way of dislocation density and material anisotropy.
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