Piezoelectric micromachined ultrasonic transducers (pMUTs) are an example of the
application of MEMS technology to ultrasound generation and detection, which is expected …

With the development of technology, systems gravitate towards increasing in their
complexity, miniaturization, and level of automation. Amongst these systems, ultrasonic …

Piezoelectric micromachined ultrasonic transducers (pMUTs), a potential alternative for
conventional one-dimensional phased array ultrasonic transducers, were investigated. We …

This paper presents an airborne piezoelectric micromachined ultrasonic transducers
(PMUTs) operated at low frequency (40-50 kHz) for long-range detection, where the acoustic …

An analytical Mason equivalent circuit is derived for a circular, clamped plate piezoelectric
micromachined ultrasonic transducer (pMUT) design in 31 mode, considering an arbitrary …

Many applications of ultrasound for sensing, actuation and imaging require miniaturized and
low power transducers and transducer arrays integrated with electronic systems …

This paper presents high fill-factor piezoelectric micromachined ultrasonic transducer
(PMUT) arrays fabricated via a novel process using cavity SOI wafers. The simple three …

The objective of this article is to review the recent advancement in piezoelectric
micromachined ultrasound transducer (PMUT) technology and the associated piezoelectric …

In recent decades, micromachined ultrasonic transducers (MUTs) have been investigated as
an alternative to conventional piezocomposite ultrasonic transducers, primarily due to the …

A piezoelectric micromachined ultrasonic transducer (pMUT) has enabled numerous
exciting ultrasonic applications. However, residual stress and initial buckling may worsen …