Fabrication of microcrystalline cubic silicon carbide/crystalline silicon heterojunction solar cell by hot wire chemical vapor deposition

C Banerjee, KL Narayanan, K Haga… - Japanese journal of …, 2007 - iopscience.iop.org
The n-type microcrystalline cubic silicon carbide (µc-3C–SiC: H) films were deposited by hot
wire chemical vapor deposition (HWCVD) at a low substrate temperature (∼ 300 C) …

Hot-wire chemical vapor deposition prepared aluminum doped p-type microcrystalline silicon carbide window layers for thin film silicon solar cells

T Chen, F Köhler, A Heidt, R Carius… - Japanese journal of …, 2014 - iopscience.iop.org
Al-doped p-type microcrystalline silicon carbide (µc-SiC: H) thin films were deposited by hot-
wire chemical vapor deposition at substrate temperatures below 400 C. Monomethylsilane …

Development of microcrystalline silicon carbide window layers by hot-wire CVD and their applications in microcrystalline silicon thin film solar cells

T Chen, Y Huang, D Yang, R Carius, F Finger - Thin Solid Films, 2011 - Elsevier
Microcrystalline silicon carbide (μc-SiC: H) thin films in stoichiometric form were deposited
from the gas mixture of monomethylsilane (MMS) and hydrogen by Hot-Wire Chemical …

Highly conductive p-type silicon carbon alloys deposited by hot-wire chemical vapor deposition

T Chen, D Yang, R Carius, F Finger - Japanese Journal of …, 2010 - iopscience.iop.org
P-type microcrystalline silicon carbide (µc-SiC: H) alloys for application as a window layer in
silicon based thin film solar cells were grown by hot-wire chemical vapor deposition using …

Highly conductive microcrystalline silicon carbide films deposited by the hot wire cell method and its application to amorphous silicon solar cells

S Miyajima, A Yamada, M Konagai - Thin Solid Films, 2003 - Elsevier
Microcrystalline silicon carbide (μc-Si1− xCx) films were successfully deposited by the hot
wire cell method using a gas mixture of SiH4, H2 and C2H2. It was confirmed by Fourier …

A new type of high efficiency with a low‐cost solar cell having the structure of a μc‐SiC/polycrystalline silicon heterojunction

Y Matsumoto, G Hirata, H Takakura… - Journal of applied …, 1990 - pubs.aip.org
A new type of high‐efficiency solar cell has been developed by a simple production process
only with electron cyclotron resonance plasma‐assisted chemical vapor deposition of highly …

Microcrystalline silicon carbide p-layer with wide-bandgap and its application to single-and triple-junction silicon thin-film solar cells

S Kim, J Park, H Lee, H Lee, SW Ahn… - Japanese Journal of …, 2012 - iopscience.iop.org
Wide-bandgap, high-quality p-type microcrystalline silicon carbide (p-µc-SiC) films have
been prepared by radio frequency plasma-enhanced chemical vapor deposition (RF …

Microcrystalline silicon carbide thin films grown by HWCVD at different filament temperatures and their application in nip microcrystalline silicon solar cells

T Chen, Y Huang, H Wang, D Yang, A Dasgupta… - Thin Solid Films, 2009 - Elsevier
To optimize the performance of microcrystalline silicon carbide (µc-SiC: H) window layers in
nip type microcrystalline silicon (µc-Si: H) solar cells, the influence of the rhenium filament …

Heterojunction amorphous silicon solar cells with n-type microcrystalline cubic silicon carbide as a window layer

S Ogawa, N Yoshida, T Itoh… - Japanese Journal of …, 2007 - iopscience.iop.org
The application of phosphorus doped hydrogenated microcrystalline cubic silicon carbide
(µc-3C–SiC: H) as a window layer of amorphous silicon (a-Si: H) solar cells is demonstrated …

Microcrystalline silicon carbide window layers in thin film silicon solar cells

T Chen, Y Huang, A Dasgupta, M Luysberg… - Solar Energy Materials …, 2012 - Elsevier
Crystalline silicon carbide alloys have a very high potential to be used as transparent
conductive window layers in thin-film solar cells provided they can be prepared in thin-film …