High-resolution non-destructive three-dimensional imaging of integrated circuits

M Holler, M Guizar-Sicairos, EHR Tsai, R Dinapoli… - Nature, 2017 - nature.com
Modern nanoelectronics, has advanced to a point at which it is impossible to image entire
devices and their interconnections non-destructively because of their small feature sizes and …

Three-dimensional imaging of integrated circuits with macro-to nanoscale zoom

M Holler, M Odstrcil, M Guizar-Sicairos, M Lebugle… - Nature …, 2019 - nature.com
The imaging of integrated circuits across different length scales is required for failure
analysis, design validation and quality control. At present, such inspection is accomplished …

High-resolution scanning x-ray diffraction microscopy

P Thibault, M Dierolf, A Menzel, O Bunk, C David… - Science, 2008 - science.org
Coherent diffractive imaging (CDI) and scanning transmission x-ray microscopy (STXM) are
two popular microscopy techniques that have evolved quite independently. CDI promises to …

Three-dimensional high-resolution quantitative microscopy of extended crystals

P Godard, G Carbone, M Allain, F Mastropietro… - Nature …, 2011 - nature.com
Hard X-ray lens-less microscopy raises hopes for a non-invasive quantitative imaging,
capable of achieving the extreme resolving power demands of nanoscience. However, a …

High-throughput ptychography using Eiger: scanning X-ray nano-imaging of extended regions

M Guizar-Sicairos, I Johnson, A Diaz, M Holler… - Optics express, 2014 - opg.optica.org
The smaller pixel size and high frame rate of next-generation photon counting pixel
detectors opens new opportunities for the application of X-ray coherent diffractive imaging …

High-resolution three-dimensional structural microscopy by single-angle Bragg ptychography

SO Hruszkewycz, M Allain, MV Holt, CE Murray… - Nature materials, 2017 - nature.com
Coherent X-ray microscopy by phase retrieval of Bragg diffraction intensities enables lattice
distortions within a crystal to be imaged at nanometre-scale spatial resolutions in three …

Towards high-resolution ptychographic x-ray diffraction microscopy

Y Takahashi, A Suzuki, N Zettsu, Y Kohmura… - Physical Review B …, 2011 - APS
Ptychographic x-ray diffraction microscopy is a lensless imaging technique with a large field
of view and high spatial resolution, which is also useful for characterizing the wavefront of an …

Ptychography at the carbon K-edge

N Mille, H Yuan, J Vijayakumar, S Stanescu… - Communications …, 2022 - nature.com
Ptychography is a coherent diffraction imaging technique that measures diffraction patterns
at many overlapping points on a sample and then uses an algorithm to reconstruct …

On-the-fly scans for X-ray ptychography

PM Pelz, M Guizar-Sicairos, P Thibault… - Applied Physics …, 2014 - pubs.aip.org
With the increasing importance of nanotechnology, the need for reliable real-time imaging of
mesoscopic objects with nanometer resolution is rising. For X-ray ptychography, a scanning …

High-performance 4-nm-resolution X-ray tomography using burst ptychography

T Aidukas, NW Phillips, A Diaz, E Poghosyan, E Müller… - Nature, 2024 - nature.com
Advances in science, medicine and engineering rely on breakthroughs in imaging,
particularly for obtaining multiscale, three-dimensional information from functional systems …