This paper presents a novel operation mechanism for ultrasonic testing in-water. The
mechanism employs the surface-tension forces between the water and ultrasonic probe …

This paper presents a new type of capacitive micromachined ultrasonic transducer (cMUT)
using polysilicon for the membrane as well as for the sacrificial layer. Further features are …

Investigations into the characteristics of water-coupled ultrasonic capacitance transducers
have been performed for a range of transducer configurations. The radiated fields have …

A capacitive micromachined ultrasonic transducer structure for use in underwater imaging is
designed, fabricated and tested in this paper. In this structure, a silicon dioxide insulation …

Piezoelectric micromachined ultrasonic transducers (pMUTs) are an example of the
application of MEMS technology to ultrasound generation and detection, which is expected …

We report experimental results from a comparative study on collapsed region and
conventional region operation of capacitive micromachined ultrasonic transducers (CMUTs) …

A novel CMUT based micro viscosity sensor is presented, in which the pulse-echo
ultrasound signal generated by CMUT is used as information carrier. The mechanical …

Background: Ultrasound is widely used in the applications of underwater imaging.
Capacitive micromachined ultrasonic transducer (CMUT) is a promising candidate for the …

Investigations into the characteristics of water-coupled ultrasonic capacitance transducers
have been undertaken for a range of transducer configurations. The radiated fields have …

This work presents the CMOS micromachined capacitive sensors for ultrasound detection in
water. The sensing membranes with a 60 µm diameter are released through small etchant …