Investigation on the mechanical interface stability of curved high aspect ratio x-ray gratings made by deep x-ray lithography

M Richter, T Beckenbach, H Daerr… - Journal of Micro …, 2022 - spiedigitallibrary.org
We describe the rationale for selecting graphite as a substrate material suitable for
manufacturing curved high-aspect ratio metallic x-ray gratings and experimentally validate …

Fabrication of 200 nm period centimeter area hard x-ray absorption gratings by multilayer deposition

SK Lynch, C Liu, NY Morgan, X Xiao… - Journal of …, 2012 - iopscience.iop.org
We describe the design and fabrication trials of x-ray absorption gratings of 200 nm period
and up to 100: 1 depth-to-period ratios for full-field hard x-ray imaging applications. Hard x …

[PDF][PDF] X-ray gratings for grating-based x-ray DPCI fabricated using the deep x-ray lithography process: State of the art

P Meyer, T Beckenbach, F An, T Schröter… - Proceedings of the …, 2017 - researchgate.net
X-ray Lithography [1] has been a versatile tool for microstructure fabrication in view of many
applications. The technology's potential to fabricate high aspect ratio microstructures in …

Super-smooth x-ray reflection grating fabrication

AE Franke, ML Schattenburg, EM Gullikson… - Journal of Vacuum …, 1997 - pubs.aip.org
Blazed, grazing incidence x-ray reflection gratings are an important component of modern
high resolution spectrometers and related x-ray optics. These have traditionally been …

Towards sub-micrometer high aspect ratio X-ray gratings by atomic layer deposition of iridium

J Vila-Comamala, L Romano, V Guzenko… - Microelectronic …, 2018 - Elsevier
X-ray grating interferometry is an excellent technique for X-ray phase contrast imaging and X-
ray wavefront sensing with applications in materials science, biology and medical diagnosis …

Fabrication of x-ray absorption gratings via deep x-ray lithography using a conventional x-ray tube

S Pinzek, T Beckenbach, M Viermetz… - Journal of Micro …, 2021 - spiedigitallibrary.org
Background: X-ray grating interferometry is an emerging imaging technique that strongly
relies on fine grating structures. A common method to fabricate compatible gratings is deep x …

Self-aligned multi-layer X-ray absorption grating using large-area fabrication methods for X-ray phase-contrast imaging

A Pil-Ali, S Adnani, KS Karim - Scientific Reports, 2023 - nature.com
X-ray phase-contrast (XPCi) imaging methods are an emerging medical imaging approach
that provide significantly better soft tissue contrast and could function as a viable extension …

Multilayer-coated micro-grating array for x-ray phase-contrast imaging

SK Lynch, C Liu, L Assoufid, NY Morgan… - EUV and X-Ray …, 2011 - spiedigitallibrary.org
X-ray imaging techniques based on grating interferometers rely on transmission gratings to
detect x-ray refraction and scattering in a sample. Gratings periods below 2 microns are …

Large area gratings by x-ray LIGA dynamic exposure for x-ray phase-contrast imaging

TJ Schröter, F Koch, P Meyer… - Journal of Micro …, 2017 - spiedigitallibrary.org
X-ray differential phase-contrast imaging (DPCI) using a Talbot–Lau interferometer at a
conventional tube source has continuously found applications since its first demonstration. It …

Double sided grating fabrication for high energy X-ray phase contrast imaging

AE Hollowell, CL Arrington, P Finnegan… - Materials Science in …, 2019 - Elsevier
State of the art grating fabrication currently limits the maximum source energy that can be
used in lab based x-ray phase contrast imaging (XPCI) systems. In order to move to higher …