Scheduling Single-Arm Multicluster Tools for Two-Type Wafers With Lower-Bound Cycle Time

Collaborative Scheduling for Single-Arm Cluster Tools With an Equipment Front-End Module Subject to Chamber Cleaning Requirements

BY Huang, TR Song, NQ Wu… - IEEE Transactions on …, 2024 - ieeexplore.ieee.org
In semiconductor manufacturing, cluster tools tend to integrate a vacuum module (VM), a
loadlock module (LLM), and an equipment front-end module (EFEM). While scheduling …
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Scheduling Cluster Tools for Concurrent Processing: Deep Reinforcement Learning With Adaptive Search

HJ Kim, JH Lee - IEEE Transactions on Automation Science …, 2024 - ieeexplore.ieee.org
We address the scheduling problem of single-armed cluster tools that concurrently process
two wafer types without assuming cyclic scheduling. These cluster tools, consisting of …
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