Design and applications of MEMS flow sensors: A review

F Ejeian, S Azadi, A Razmjou, Y Orooji… - Sensors and Actuators A …, 2019 - Elsevier
There is an indispensable need for fluid flow rate and direction sensors in various medical,
industrial and environmental applications. Besides the critical demands on sensing range of …

Hair flow sensors: from bio-inspiration to bio-mimicking—a review

J Tao, XB Yu - Smart Materials and Structures, 2012 - iopscience.iop.org
A great many living beings, such as aquatics and arthropods, are equipped with highly
sensitive flow sensors to help them survive in challenging environments. These sensors are …

Giant tunneling piezoresistance of composite elastomers with interlocked microdome arrays for ultrasensitive and multimodal electronic skins

J Park, Y Lee, J Hong, M Ha, YD Jung, H Lim, SY Kim… - ACS …, 2014 - ACS Publications
The development of flexible electronic skins with high sensitivities and multimodal sensing
capabilities is of great interest for applications ranging from human healthcare monitoring to …

[HTML][HTML] Noncontact and nonintrusive microwave-microfluidic flow sensor for energy and biomedical engineering

MH Zarifi, H Sadabadi, SH Hejazi, M Daneshmand… - Scientific reports, 2018 - nature.com
A novel flow sensor is presented to measure the flow rate within microchannels in a real-
time, noncontact and nonintrusive manner. The microfluidic device is made of a fluidic …

[HTML][HTML] Microfluidic cantilever detects bacteria and measures their susceptibility to antibiotics in small confined volumes

H Etayash, MF Khan, K Kaur, T Thundat - Nature communications, 2016 - nature.com
In the fight against drug-resistant bacteria, accurate and high-throughput detection is
essential. Here, a bimaterial microcantilever with an embedded microfluidic channel with …

Biomimetic ultraflexible piezoresistive flow sensor based on graphene nanosheets and PVA hydrogel

S Abolpour Moshizi, H Moradi, S Wu… - Advanced Materials …, 2022 - Wiley Online Library
Flow sensors play a critical role in monitoring flow parameters, including rate, velocity,
direction, and rotation frequency. In this paper, inspired by biological hair cells in the human …

Bioinspired carbon nanotube fuzzy fiber hair sensor for air-flow detection.

MR Maschmann, GJ Ehlert, BT Dickinson… - … (Deerfield Beach, Fla …, 2014 - europepmc.org
Artificial hair sensors consisting of a piezoresistive carbon-nanotube-coated glass fiber
embedded in a microcapillary are assembled and characterized. Individual sensors …

Silicon nanowires driving miniaturization of microelectromechanical systems physical sensors: A review

M Karimzadehkhouei, B Ali… - Advanced …, 2023 - Wiley Online Library
The miniaturization of microelectromechanical systems (MEMS) physical sensors is driven
by global connectivity needs and is closely linked to emerging digital technologies and the …

A miniaturized piezoresistive flow sensor for real‐time monitoring of intravenous infusion

R Hagihghi, A Razmjou, Y Orooji… - … Research Part B …, 2020 - Wiley Online Library
Drug overdose (DO) is considered one of the current issues of intravenous (IV) infusion
particularly resulting in serious injuries and deaths. Malfunction of infusion pumps is …

A Sub-5mW Monolithic CMOS-MEMS Thermal Flow Sensing SoC With 6 m/s Linear Range

W Xu, Z Li, Z Fang, B Wang, L Hong… - IEEE Journal of Solid …, 2023 - ieeexplore.ieee.org
This article presents a complementary metal-oxide semiconductor (CMOS)-
microelectromechanical system (MEMS) monolithic integrated thermal flow sensor system …