A great many living beings, such as aquatics and arthropods, are equipped with highly
sensitive flow sensors to help them survive in challenging environments. These sensors are …

The response to different force load ranges and actuation at low energies is of considerable
interest for applications of compliant and flexible devices undergoing large deformations …

The field of piezoresistive sensors has been undergoing a significant revolution in terms of
design methodology, material technology and micromachining process. However, the …

This paper presents a novel flexible airflow sensor based on four curved microcantilevers
arranged in a cross-form configuration. A self-bending method based on MEMS technology …

In this article, a mechanical wind sensor based on additive manufacturing technology is
demonstrated for the first time. The sensor is composed of a cylindrical sensing structure …

In this paper, we present a micro flow sensor from a polymer based on the thermal
anemometric principle. A sensor with outer dimensions of 5.5× 6× 1.2 mm 3 and a small …

This paper reports on the creation of a low-cost, disposable sensor for low flow velocities,
constructed from extruded micro-sized'hair'of conducting polymer PEDOT. These …

Attaining the information of the hydrodynamic flow rate and direction is essential to the
maneuvering of autonomous underwater vehicles (AUVs). This work presents a pillar-based …

A microfluidic flow meter based on cantilever deflection is developed, showing a resolution
down to 3 nL min− 1 for flows in the microliter range. The cantilevers are fabricated in SU-8 …

This paper demonstrates the monolithic integration of an airflow sensor based on out-of-
plane movable cantilevers with a CMOS integrated circuit providing small footprint and low …